UDC 621.9.015

DEVELOPMENT OF TECHNOLOGICAL ROUTE CLEANING SEMICONDUCTOR WAFERS FOR MICROELECTRONIC PRODUCTS

Sychikova Yana Alexandrovna
Berdyansk State Pedagogical University
Candidate of Physical and Mathematical Sciences, associate professor of teaching methods of physical and mathematical sciences and information technology in education

Abstract
The paper presents the route of preparation of semiconductor wafers to further their use in microelectronics. The main steps in the purification of the crystals depending on the type of pollutant.

Keywords: cleaning, polishing, pollution, semiconductor


Article reference:
Development of technological route cleaning semiconductor wafers for microelectronic products // Modern technics and technologies. 2015. № 1 [Electronic journal]. URL: http://technology.snauka.ru/en/2015/01/5408

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