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UDC 533.9.07.14, 533.9 (075.8)
VACUUM-ARC PLASMA SOURCES IN THE PRODUCTION OF ELECTROVACUUM DEVICES
Senin Maxim Alexandrovich
Saint Petersburg state electrotechnical University "LETI"
student
Saint Petersburg state electrotechnical University "LETI"
student
Abstract
Currently to solve complex technological problems in the application of coatings in vacuum vacuum-arc plasma sources are widely used. Their application allows obtaining a protective, strengthening, heat-resistant and a number of other functional coatings. The feature of their operation is to generate the plasma stream and control its movement. The paper presents the issues of generation and control of the motion of charged component in an external magnetic field.
Keywords: coating, plasma flux, plasma source, vacuum-arc discharge
Article reference:
Vacuum-arc plasma sources in the production of electrovacuum devices // Modern technics and technologies. 2015. № 7 [Electronic journal]. URL: https://technology.snauka.ru/en/2015/07/7568
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