Sorry, this article is only available in Русский.
UDC 621.9.015
DEVELOPMENT OF TECHNOLOGICAL ROUTE CLEANING SEMICONDUCTOR WAFERS FOR MICROELECTRONIC PRODUCTS
Sychikova Yana Alexandrovna
Berdyansk State Pedagogical University
Candidate of Physical and Mathematical Sciences, associate professor of teaching methods of physical and mathematical sciences and information technology in education
Berdyansk State Pedagogical University
Candidate of Physical and Mathematical Sciences, associate professor of teaching methods of physical and mathematical sciences and information technology in education
Abstract
The paper presents the route of preparation of semiconductor wafers to further their use in microelectronics. The main steps in the purification of the crystals depending on the type of pollutant.
Keywords: cleaning, polishing, pollution, semiconductor
Article reference:
Development of technological route cleaning semiconductor wafers for microelectronic products // Modern technics and technologies. 2015. № 1 [Electronic journal]. URL: https://technology.snauka.ru/en/2015/01/5408
View this article in Russian
© If you have found a violation of copyrights please notify us immediately by e-mail.