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UDC 533.9.07.14, 533.9 (075.8)
PLASMA TECHNOLOGY IN THE PRODUCTION OF VACUUM DEVICES
Senin Maxim Alexandrovich
Saint Petersburg state electrotechnical University "LETI"
student
Saint Petersburg state electrotechnical University "LETI"
student
Abstract
To solve technological problems in the production of vacuum devices arc plasma sources, forming an intense plasma flow and allowing modification of the surface of parts are applied. In addition, they are used for the application of protective, strengthening, heat-resistant or other functional coatings.
Keywords: generating lamp, plasma source, protective and antiemission coatings, vacuum-arc discharge
Article reference:
Plasma technology in the production of vacuum devices // Modern technics and technologies. 2015. № 8 [Electronic journal]. URL: https://technology.snauka.ru/en/2015/08/7706
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