UDC 533.9.07.14, 533.9 (075.8)

PLASMA TECHNOLOGY IN THE PRODUCTION OF VACUUM DEVICES

Senin Maxim Alexandrovich
Saint Petersburg state electrotechnical University "LETI"
student

Abstract
To solve technological problems in the production of vacuum devices arc plasma sources, forming an intense plasma flow and allowing modification of the surface of parts are applied. In addition, they are used for the application of protective, strengthening, heat-resistant or other functional coatings.

Keywords: generating lamp, plasma source, protective and antiemission coatings, vacuum-arc discharge

Article reference:
Plasma technology in the production of vacuum devices // Modern technics and technologies. 2015. № 8 [Electronic journal]. URL: https://technology.snauka.ru/en/2015/08/7706

View this article in Russian

Sorry, this article is only available in Русский.

All articles of author «Сенин Максим Александрович»