ISSN 2225-644X
18+
Русский
English
Electronic scientific & practical journal «Modern technics and technologies»
For Authors
Publish article
Payment methods
Order certificate of publication
Order print issue of e-journal
About journal
About journal
Contacts
Issues archive
Languages of publications
Search
Reviews of project
Articles by keyword «RIE»
Articles in journal «Modern technics and technologies»
Обзор высоко-аспектных процессов травления кремния
№ 6 June 2014
Articles in journal «Modern Scientific Researches and Innovations»
Zapevalin A.I. Overview of gas-phase chemistry used for plasma chemical etching Si, SiO2 and Si3N4.
June, 2014
