Electronic scientific & practical journal «Modern technics and technologies»
ISSN 2225-644X
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Articles by keyword «RIE»
Articles in journal «Modern technics and technologies»
An overview of high-Aspect process silicon etching
№ 6 June 2014
Articles in journal «Modern Scientific Researches and Innovations»
Zapevalin A.I. Overview of gas-phase chemistry used for plasma chemical etching Si, SiO2 and Si3N4.
June, 2014
